MMT is a specialized company in ultra-precision motion control systems, handling ultra-precision stages, nanomotion, linear encoders, and air bearings. The company also expertly provides by-product trapping devices, real-time gas analysis systems, and environmental control equipment to enhance efficiency and safety in semiconductor manufacturing processes. It focuses on developing nanomotion technology to meet rapid miniaturization and high-precision trends, offering total solutions through the convergence of motion, vision, and software technologies.MMTisaspecializedcompanyinultra-precisionmotioncontrolsystems,handlingultra-precisionstages,nanomotion,linearencoders,andairbearings.Thecompanyalsoexpertlyprovidesby-producttrappingdevices,real-timegasanalysissystems,andenvironmentalcontrolequipmenttoenhanceefficiencyandsafetyinsemiconductormanufacturingprocesses.Itfocusesondevelopingnanomotiontechnologytomeetrapidminiaturizationandhigh-precisiontrends,offeringtotalsolutionsthroughtheconvergenceofmotion,vision,andsoftwaretechnologies.
Key Products/TechnologiesKeyProducts/Technologies
The ultra-precision stage product line includes various Motorized and Manual Stages such as Align Stage, Miniature Stage, Linear Stage, Z stage, Rotary Stage, Tiling Stage, Dovetail Stage, and Micrometer Head. The Align Stage features X, Y, and Θ-axis alignment drive, compact size, and high precision through a 3D Encoder option. It provides integrated system solutions using proprietary precision compensation control algorithms applied to software and driver controllers.Theultra-precisionstageproductlineincludesvariousMotorizedandManualStagessuchasAlignStage,MiniatureStage,LinearStage,Zstage,RotaryStage,TilingStage,DovetailStage,andMicrometerHead.TheAlignStagefeaturesX,Y,andΘ-axisalignmentdrive,compactsize,andhighprecisionthrougha3DEncoderoption.Itprovidesintegratedsystemsolutionsusingproprietaryprecisioncompensationcontrolalgorithmsappliedtosoftwareanddrivercontrollers.
Nanomotion technology focuses on developing nano-positioning technology to address trends in rapid miniaturization and high precision. The company possesses linear encoder technology essential for ultra-precision position control and has capabilities in developing and mass-producing large air bearing stages and air floating systems.Nanomotiontechnologyfocusesondevelopingnano-positioningtechnologytoaddresstrendsinrapidminiaturizationandhighprecision.Thecompanypossesseslinearencodertechnologyessentialforultra-precisionpositioncontrolandhascapabilitiesindevelopingandmass-producinglargeairbearingstagesandairfloatingsystems.
By-product trapping devices and environmental control equipment for semiconductor manufacturing include various traps and controllers that capture process by-products from semiconductor production equipment, extending vacuum pump lifetime. Customized solutions for specific processes, such as TiCl4 traps, W traps, ACL traps, Etch traps, Cold traps, Noa traps, and Heating traps, are part of its offerings.By-producttrappingdevicesandenvironmentalcontrolequipmentforsemiconductormanufacturingincludevarioustrapsandcontrollersthatcaptureprocessby-productsfromsemiconductorproductionequipment,extendingvacuumpumplifetime.Customizedsolutionsforspecificprocesses,suchasTiCl4traps,Wtraps,ACLtraps,Etchtraps,Coldtraps,Noatraps,andHeatingtraps,arepartofitsofferings.
The real-time gas analysis system provides real-time analysis of specific gas concentrations and prevents safety accidents through an O2 TDL Analyzer System. It also offers heater blocks for compensating cleaning gas temperature and control controllers. The ADS (Advanced Data Security) system contributes to the efficient operation and cost reduction of customer equipment.Thereal-timegasanalysissystemprovidesreal-timeanalysisofspecificgasconcentrationsandpreventssafetyaccidentsthroughanO2TDLAnalyzerSystem.Italsooffersheaterblocksforcompensatingcleaninggastemperatureandcontrolcontrollers.TheADS(AdvancedDataSecurity)systemcontributestotheefficientoperationandcostreductionofcustomerequipment.
Parts & Repair services include the provision of repair services for semiconductor equipment parts such as traps, heaters, and motors, enhancing customer support.Parts&Repairservicesincludetheprovisionofrepairservicesforsemiconductorequipmentpartssuchastraps,heaters,andmotors,enhancingcustomersupport.
Core AdvantagesCoreAdvantages
Since its establishment in 2000, the company has been a leading enterprise in the ultra-precision motion control sector in Korea, continuously striving for technological development and quality improvement. [database]Sinceitsestablishmentin2000,thecompanyhasbeenaleadingenterpriseintheultra-precisionmotioncontrolsectorinKorea,continuouslystrivingfortechnologicaldevelopmentandqualityimprovement.[database]
Possession of nanomotion technology development capabilities and convergence technology of motion, vision, and S/W to provide customized total solutions to customers. [database, 5]Possessionofnanomotiontechnologydevelopmentcapabilitiesandconvergencetechnologyofmotion,vision,andS/Wtoprovidecustomizedtotalsolutionstocustomers.[database,5]
Focus on localization of motion control components, development of modules responding to customer demands, and joint development of OEM systems to secure technological competitiveness. Successful localization of products previously dependent on overseas imports.Focusonlocalizationofmotioncontrolcomponents,developmentofmodulesrespondingtocustomerdemands,andjointdevelopmentofOEMsystemstosecuretechnologicalcompetitiveness.Successfullocalizationofproductspreviouslydependentonoverseasimports.
Acquisition of quality management certifications such as QS-9000 and ISO-9001, providing integrated solutions through structural analysis, vibration analysis, advanced control technology, and inspection equipment like laser interferometers capable of nanometer measurement.AcquisitionofqualitymanagementcertificationssuchasQS-9000andISO-9001,providingintegratedsolutionsthroughstructuralanalysis,vibrationanalysis,advancedcontroltechnology,andinspectionequipmentlikelaserinterferometerscapableofnanometermeasurement.
High efficiency and customized manufacturing capabilities for semiconductor process by-product trapping devices, with long PM cycles (over 12 months for Etch traps, over 6 months for TiCl4 ALD/TiN Non-Stop traps) maximizing equipment uptime.Highefficiencyandcustomizedmanufacturingcapabilitiesforsemiconductorprocessby-producttrappingdevices,withlongPMcycles(over12monthsforEtchtraps,over6monthsforTiCl4ALD/TiNNon-Stoptraps)maximizingequipmentuptime.
Real-time gas concentration analysis and safety accident prevention functions utilizing O2 TDL Detectors, along with technology to minimize process downtime during trap replacement through a bypass-type structure.Real-timegasconcentrationanalysisandsafetyaccidentpreventionfunctionsutilizingO2TDLDetectors,alongwithtechnologytominimizeprocessdowntimeduringtrapreplacementthroughabypass-typestructure.
Development of the world's first Absolute 3D Encoder and its application to various stages, demonstrating innovative technological prowess.Developmentoftheworld'sfirstAbsolute3DEncoderanditsapplicationtovariousstages,demonstratinginnovativetechnologicalprowess.
Target IndustriesTargetIndustries
Semiconductor manufacturing and inspection equipment industry: Application of ultra-precision stages and nanomotion technology in wafer inspection, mask alignment, and fine patterning processes.Semiconductormanufacturingandinspectionequipmentindustry:Applicationofultra-precisionstagesandnanomotiontechnologyinwaferinspection,maskalignment,andfinepatterningprocesses.
Display manufacturing and inspection industry: Utilization of high-precision align stages for panel alignment, defect detection, and fine process control.Displaymanufacturingandinspectionindustry:Utilizationofhigh-precisionalignstagesforpanelalignment,defectdetection,andfineprocesscontrol.
Optics and laser equipment industry: Provision of high-precision motion solutions required for precise position control of optical components, laser processing, and measurement systems.Opticsandlaserequipmentindustry:Provisionofhigh-precisionmotionsolutionsrequiredforprecisepositioncontrolofopticalcomponents,laserprocessing,andmeasurementsystems.
Camera and secondary battery manufacturing sectors: Increasing use of ultra-precision position control stages and precision component parts.Cameraandsecondarybatterymanufacturingsectors:Increasinguseofultra-precisionpositioncontrolstagesandprecisioncomponentparts.
Major MarketsMajorMarkets
TaiwanTaiwan
Certifications/PatentsCertifications/Patents
Possession of a patent related to bypass-type semiconductor manufacturing by-product trapping devices (KR102672167B1).Possessionofapatentrelatedtobypass-typesemiconductormanufacturingby-producttrappingdevices(KR102672167B1).
Acquisition of CE certification for Etch Trap controllers.AcquisitionofCEcertificationforEtchTrapcontrollers.
History of patent acquisition in 2008.Historyofpatentacquisitionin2008.
Presence of a 'Certifications and Patent Status' section on the company's website.Presenceofa'CertificationsandPatentStatus'sectiononthecompany'swebsite.