Korea Vacuum Tech, The Republic of Korea - Komachine Supplier Profile and Product List

- Korea Vacuum Tech Co., Ltd. is a specialized manufacturer of vacuum systems and components, established in 1996. The company develops and supplies thin-film process equipment essential for semiconductor and display production, including plasma-based vacuum deposition, etching, and cleaning systems. It offers both customized equipment for R&D and process equipment for mass production lines. The company provides diverse vacuum equipment solutions, including vacuum dryers for lithium-ion batteries.Korea Vacuum Tech Co., Ltd. is a specialized manufacturer of vacuum systems and components, established in 1996. The company develops and supplies thin-film process equipment essential for semiconductor and display production, including plasma-based vacuum deposition, etching, and cleaning systems. It offers both customized equipment for R&D and process equipment for mass production lines. The company provides diverse vacuum equipment solutions, including vacuum dryers for lithium-ion batteries.
- Vacuum Deposition Systems: Development and supply of plasma-based Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) equipment. Sputtering Systems (KVS-2000, KVS-4000, KVS-5000, KVIS-Series, Bench Top Sputter Series) offer diverse target material application and high film uniformity. Evaporator Systems (E-BEAM Series, Thermal Series, E-beam & Thermal Series, iBAD Series, OLED R&D Series, E-beam & Sputter Series) allow for simultaneous or selective use of E-beam and Thermal sources. Atomic Layer Deposition (ALD) equipment (KVAC-4000L, KVA-CCP4000L, ALD-CVD Series, PEALD) and Pulsed Laser Deposition (PLD) equipment (KVP-2000 Series) are also part of its product portfolio.Vacuum Deposition Systems: Development and supply of plasma-based Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) equipment. Sputtering Systems (KVS-2000, KVS-4000, KVS-5000, KVIS-Series, Bench Top Sputter Series) offer diverse target material application and high film uniformity. Evaporator Systems (E-BEAM Series, Thermal Series, E-beam & Thermal Series, iBAD Series, OLED R&D Series, E-beam & Sputter Series) allow for simultaneous or selective use of E-beam and Thermal sources. Atomic Layer Deposition (ALD) equipment (KVAC-4000L, KVA-CCP4000L, ALD-CVD Series, PEALD) and Pulsed Laser Deposition (PLD) equipment (KVP-2000 Series) are also part of its product portfolio.
- Etching and Cleaning Equipment: Etching equipment (Ion Milling Series, RIE Series, ICP-RIE Series) plays a crucial role in semiconductor and display processes. Cleaning systems are also a vital component of its vacuum system offerings.Etching and Cleaning Equipment: Etching equipment (Ion Milling Series, RIE Series, ICP-RIE Series) plays a crucial role in semiconductor and display processes. Cleaning systems are also a vital component of its vacuum system offerings.
- Thermal Process and Other Vacuum Systems: Rapid Thermal Processing (RTP) systems (KVR-2000 Series, KVR-4000 Series, KVR-6000 Series, Bench Top RTP Series) achieve high temperatures up to 1100℃ with rapid heating rates of 100℃/sec. Vacuum Dryers for LiB (Lithium-ion Battery) are essential equipment in battery manufacturing processes. The company also develops and supplies various customized vacuum systems, including Josephson Junction Systems (JDR-E Series, JDR-S Series, JDR-I Series), Ion-Beam, Multi-function, and Intelsi Systems (Intelsi-L Series, Intelsi-M Series).Thermal Process and Other Vacuum Systems: Rapid Thermal Processing (RTP) systems (KVR-2000 Series, KVR-4000 Series, KVR-6000 Series, Bench Top RTP Series) achieve high temperatures up to 1100℃ with rapid heating rates of 100℃/sec. Vacuum Dryers for LiB (Lithium-ion Battery) are essential equipment in battery manufacturing processes. The company also develops and supplies various customized vacuum systems, including Josephson Junction Systems (JDR-E Series, JDR-S Series, JDR-I Series), Ion-Beam, Multi-function, and Intelsi Systems (Intelsi-L Series, Intelsi-M Series).
- Vacuum System Expertise: Accumulated know-how in vacuum process equipment development and manufacturing since 1996. Deep understanding and technological capability in core vacuum processes such as PVD, CVD, etching, and cleaning, based on plasma technology.Vacuum System Expertise: Accumulated know-how in vacuum process equipment development and manufacturing since 1996. Deep understanding and technological capability in core vacuum processes such as PVD, CVD, etching, and cleaning, based on plasma technology.
- Customized Solution Provision: Ability to design and manufacture equipment tailored to the specific requirements of various clients, including domestic and international research institutes, universities, and mass production companies. Possession of a flexible production system optimized for multi-product, small-batch manufacturing.Customized Solution Provision: Ability to design and manufacture equipment tailored to the specific requirements of various clients, including domestic and international research institutes, universities, and mass production companies. Possession of a flexible production system optimized for multi-product, small-batch manufacturing.
- Productivity and Reliability: Provision of high yield, stability, and automated process control features for mass production line equipment. In-house execution of the entire process from design to final production, ensuring the construction of high-quality customized equipment.Productivity and Reliability: Provision of high yield, stability, and automated process control features for mass production line equipment. In-house execution of the entire process from design to final production, ensuring the construction of high-quality customized equipment.
- Global Market Competitiveness: Strengthening exports to major markets such as the USA, Japan, China, India, and Finland, earning recognition for its technological prowess. Assurance of product reliability through international quality management system certifications (ISO 9001).Global Market Competitiveness: Strengthening exports to major markets such as the USA, Japan, China, India, and Finland, earning recognition for its technological prowess. Assurance of product reliability through international quality management system certifications (ISO 9001).
- Technological Innovation and Intellectual Property: Continuous investment in research and development and ownership of 3 patents, securing technological competitiveness. Capability to support R&D activities for next-generation technologies, including advanced semiconductor devices, new materials, and display technologies.Technological Innovation and Intellectual Property: Continuous investment in research and development and ownership of 3 patents, securing technological competitiveness. Capability to support R&D activities for next-generation technologies, including advanced semiconductor devices, new materials, and display technologies.
- Semiconductor Industry: Supply of vacuum deposition, etching, and cleaning equipment, which are crucial for semiconductor device manufacturing processes.Semiconductor Industry: Supply of vacuum deposition, etching, and cleaning equipment, which are crucial for semiconductor device manufacturing processes.
- Display Industry: Application of thin-film process equipment and OLED R&D systems necessary for display panel production.Display Industry: Application of thin-film process equipment and OLED R&D systems necessary for display panel production.
- New Materials and Advanced Technology Research: Support for advanced R&D fields such as next-generation semiconductor device development, new material creation, and optical component manufacturing.New Materials and Advanced Technology Research: Support for advanced R&D fields such as next-generation semiconductor device development, new material creation, and optical component manufacturing.
- Energy Industry: Supply of vacuum dryers for Lithium-ion Battery (LiB) manufacturing processes.Energy Industry: Supply of vacuum dryers for Lithium-ion Battery (LiB) manufacturing processes.
- LED Industry: Utilization of RTP systems in various application areas, including GaN-based LED processes.LED Industry: Utilization of RTP systems in various application areas, including GaN-based LED processes.
- Japan, China, IndiaJapan, China, India
- FinlandFinland
- USAUSA
- ISO 9001 Quality Management System Certification: Acquisition of KA A9001/ISO 9001/EN ISO 9001 certifications for the entire process of design, development, production, and service.ISO 9001 Quality Management System Certification: Acquisition of KA A9001/ISO 9001/EN ISO 9001 certifications for the entire process of design, development, production, and service.
- Technology Patents: Securing technological competitiveness through the ownership of 3 patents.Technology Patents: Securing technological competitiveness through the ownership of 3 patents.