Gas System
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ILJIN ENG

Clean room manufacturer, Clean room system, Air conditioning and chilling system and more

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Manufacturer
ILJIN ENG
Product Type
Machine
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SKU
77792
Product Name
Gas System
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Product Details

1) GAS의 일반적인 용도
Purge용, 분위기용 등으로 대량 사용하고 있지만 N₂중의 불순물인 O₂는 산화막 생성으로 품질저하를 초래하므로 O₂, 수분 등을 각각 1ppm 이하로 제거할 필요가 있다. 

2) SYSTEM의 구성   
① ON SITE PLANT 또는 LN₂ (LIQUID NITROGEN)가스 저장설비를 갖추고 상설 가스 공급회사로부터 LN₂를 공급받아 사용하고, GAS 및 배관중의 부유물 등을 제거하기 위해 FILTER류를 설치하며, 제조회사 GAS 제조과정, 용기의 보관, 운송 교환 등에서 오염될 가능성 대비 및 초고순도 GAS가 요구될 때에는 정제기를 설치한다.
② LN₂가스 저장 설비는 YARD에 설치하며, 1차. 2차 FILTER는 기계실에 설치한다.
③ LN₂가스 저장 설비에서 기화된 GN₂의 공급압력은 7 ㎏/㎠으로 공급하며, 압력조절은 LN₂가스 저장 설비내에서 조정이 가능하다.

ILJIN ENG
Clean room manufacturer, Clean room system, Air conditioning and chilling system and more
IL-JIN Engineering Co., Ltd. founded in 1986, is devoted to the world-best company in clean room system, Semi-conductor equipment, and LCD equipment field. IL-JIN Engineering Co., Ltd make the technical data base through the innovation, research and development For this reason IL-JIN Engineering Co., Ltd can make a resolution in the age of limitless competition. Il-JIN Engineering Co., Ltd is on the way to the second leap, through the consistent technology development and the technical cooperation with Daiichi (Semi-conductor & LCD Handling Equipment company, Japan) When have been trying to impress customers through the strict quality assurance system since the establishemnt, Our all divisions in the company - R&D, Design, Manufacturing, After Service, and Quality- are organized for customer's present and future. IL-JIN Engineering Co., Ltd will make a big effort to satisfy you and lead the international standard technologies with you. The relationship with IL-JIN Engineering Co., Ltd will prosper your business and IL-JIN Enginerring Co., Ltd will be your business companion, forever.
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